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Analysis OF MEMS DEFORMABLE MIRROR TECHNOLOGY Chandran VinothKumar – A0065626B

Department of Electrical and Computer Engineering, NUS, Singapore


Adaptive Optics ( AO ) engineering originally invented for bettering astronomical imagination have found many other applications like retinal imagination, microscopy, laser communicating, defense mechanism, etc. over the decennary. MEMS Deformable Mirrors ( DM ) are the most normally used wavefront corrector in most of AO applications due to their versatility, the high declaration rectification of wavefront aberrances and advanced engineering. The imaging application plays a major function in promotion in deformable mirror engineering. The demand for high declaration images demands for really advanced AO enabled imaging systems. Retinal imagination is the major system presently utilizing AO engineering with it. AO engineering holds promise to the physicians to alter the manner they diagnose disease. Recent research found that, retinal imagination engineering is to foretell high blood pressure, diabetes, shot, bosom disease and other hazard factors. In this paper, the usage of DM in retinal imagination has been demonstrated foremost. Further different possible DM constellations have been discussed. Besides the range of DM in other types of imaging techniques and its future way has been discussed.

Keywords –Mems, deformable mirror, adaptative optics, retinal imagination, wavefront rectification.

1. Introduction

Leading vision scientists believe that the retina of human oculus will be a window for human wellness for someday. The capableness to decide photoreceptors or single retina cells and optic blood flow utilizing microscopic position will let scientists to name alterations in patient wellness. This gives promise to observe, name, and handle the major oculus diseases such as diabetic retinopathy, glaucoma, and age related macular devolution noninvasively. An extremist high declaration image of the human retina has non been achieved since due to the imperfectnesss of the oculus within itself, taking to wavefront aberrances.

AO system corrects the wavefront deformations caused by the cornea and crystalline lens and provides high contrast degrees and retinal declaration degrees. The two major techniques for retinal imagination utilizing AO are confocal scanning optical maser ophthalmoscopy ( SLO ) and optical coherency imaging ( OCT ) . The working rule of Confocal SLO is, when optical maser visible radiation is focussed on the retina, an image is created utilizing scanning. The system without AO produces declaration degrees in the scope of 5-10 µm graduated table and this declaration is non sufficient to observe cells of about 3 µm. AO retinal imagination can give 1 µm declaration degrees. In OCT, an interferometric imagination technique is used which creates 3D images.

2. Typical Retinal Imaging System

The most normally used retinal imagination system is Adaptive Optics Scaning Laser Ophthalmoscope ( AOSLO ) . This operates under the rule of confocal microscopy, where oculus is used as the nonsubjective lens and retina is taken to be the sample.

2.1 Adaptive Opticss

Adaptive Optics ( AO ) is an optical system whichadaptsto compensate for optical effects ( usually wavefront aberrances ) introduced by the medium between the object and its image. Here AO steps and compensates for the fuzz ( or state aberrances ) in an optical imagination system. Fig.1 shows typical adaptative optics system which consists of three chief constituents – a wave front detector to mensurate deformation, a wave front corrector( MEMS DM )to counterbalance for the deformation and control system to cipher the rectification needed and necessary signal to use to the wave front corrector to acquire proper form.

2.1.1. Wavefront Sensor:Hartmann-Shack wave front detector is usually used to mensurate the wavefront aberrances of the human oculus. This detector provides a fast, precise, and nonsubjective measuring of the wavefront aberrances of the oculus. The information from this detector is really much necessity fordeformable mirrorto rectify the wavefront mistakes.

A point beginning ( visible radiation ) is imaged on the retina, and the reflected wave front is observed by a wave front detector which uses lenslet array conjugate to the pupil plane of the oculus. Depending on the aberrated wave front, the places of the musca volitanss taken by the lenslet array are displaced. The divergences of the musca volitanss are reconstructed to the aberrated wave front.

2.1.2. Control System:The aberrated wave front from wave front detector is given as input to the control system. This system compares the mensural wave front with that of required wave front without aberrances and the difference between the two moving ridge foreparts is the error signal for compensation. This error signal is converted into electrical signals to run wavefront corrector i.e. deformable mirror.

2.1.3. Wavefront Corrector – Deformable Mirror ( DM ) :Mems DMs are one of the advanced wave front control devices that consist of a mirror membrane with an implicit in actuator array. Each actuator in the array can be deflected independently by piezo-electric or electrostatic propulsion in order to obtain the coveted form of distortion of the mirror membrane. Electrostatic actuation-free mirror distortion but still other types of actuators besides in usage.

The optics from retina is aberrated due to internal optics job. So a deformable mirror normally deformed in such a manner that end product from deformable mirror has no aberrances supplying high declaration image of the retina.

The propulsion signals are given from control system so every bit to supply proper distortion of mirror to obtain aberration free wave front as end product. The system now becomes closed cringle one since the end product from DM is once more fed back to the wave front detector. Thus the closed cringle system maintains changeless aberrance free end product. The end product from DM is fed to the high definition camera to image the sample ( retina ) . Deformable Mirror Parameters:

Number of actuatorsdetermines the figure of grades of freedom i.e. wavefrontinflections that the mirror can rectify.

Actuator pitchis the distance between the two actuator Centres. DM with big actuator pitch along with big figure of actuators seems to go expensive and expensive.

Actuator strokeis the possible supplanting of the actuator at the upper limit which will be positive or negative values with regard to the cardinal void place. An actuator stroke typically ranges from ±1 to ±10.

Actuator matchingis the indicant of perturbation caused by motion of one of the actuator with its neighbors.

Hysteresisis the nonlinear effects of actuator which affects the preciseness of the response clip of the DM. The hysteresis usually varies from practically zero ( for electrostatic actuated mirrors ) to 10s of per centum for mirrors ( for piezoelectric actuators ) . Hysteresis is defined as the positional mistake compared from old place bids of actuator and hence this factor has to be limited for better operation of AO.

Response clipis the indicant of how fast the mirror will respond towards the control signal and it is usually in the scope of microseconds.

3. Root of Deformable mirror

The major usage of Mems DM is in adaptative optics systems. The root ofthis AOtechnology is astronomy field. It was introduced in 1950s to better the astronomical images by rectifying the atmospheric aberrances. Today, all of land based telescopes around the universe are utilizing this AO system along with deformable mirrors which are supplying dependable high declaration images of the mark. MEMS DMs are used as wavefront corrector in telescopes and have resulted in 2-3X additions of declaration. Now the major uranology related research undertakings are utilizing this Mems DMs as wavefront correctors.

4. MEMS Deformable Mirror – Configurations

Mems DMhave five different constellations which are uninterrupted facesheet, segmented facesheet, membrane, bimorph and ferrofluidic.

Segmented DMis formed by independent level mirror sections ( Fig. 4b ) . Each of the mirror sections can travel a little distance to endorse and Forth with regard to the wavefront rectification signals. These single mirrors have zero or really low cross-talk in between the actuators. But bit-by-bit estimate non works good for smooth uninterrupted wave fronts. And it is seen from fig. 4b, that gaps between crisp borders of the sections and the sections consequences in light dispersing, such as restricting the applications of this type to those non sensitive to scattered visible radiation. An betterment in the public presentation of metameric DM can be made by take a firm standing three grades of freedom per section. But these mirrors require three times more actuators than that of Piston based metameric mirrors. As shown in fig 4, local influence of warp on its neighbouring actuators is ~20 % of maximal shot for uninterrupted facesheet type and 0 % of maximal shot for a metameric DM. The metameric mirror was usually used for fiction of mostly segmented primary mirrors for thetelescopes.

Continuous DMis formed by individual thin deformable membrane. The form of the membrane is varied by distinct actuators which are fixed in its back side. The distortion or form of the mirror depends on the forces applied to the home base back uping the mirror, boundary conditions ( manner the home base is fixed to the mirror ) and the stuff of the home base. This type of mirror is taken to be the best since this provides smooth wave fronts control with really big grades of freedom.

Membrane based mirrors are made by a thin conductive every bit good as brooding type membrane stretched on solid level frame. Normally the membrane uses electrostatic based distortion by using electromotive forces to the electrode of the actuator which can be placed over the membrane.

Bimorph conceptmirrors are made by two or more beds of different signifiers of stuffs. These beds are fabricated from an electrostrictive or piezoelectric stuff. When a electromotive force is applied to its electrodes, the mirror gets deformed allowing them to spread out laterally, which in bend provides local mirror curvature.

Ferrofluidconceptmirrors are new construct of DM which is really a liquid deformable mirrors made with little ( 10 nanometer in Defense Intelligence Agency ) ferromagnetic nanoparticles which are dispersed in a liquid bearer. On the application of external magnetic field, these ferromagnetic nanoparticles gets aligned with that of field, now the liquid becomes magnetized and the liquid surface gets a form ( as shown in fig. 5 ) due to the equilibrium status between the magnetic, surface tenseness and gravitative forces.

5. MEMS Deformable Mirror – Actuators

Presently, Mems DMs are chiefly actuated piezoelectrically, electrostatically or electromagnetically. Since piezoelectric actuated mirrors have the drawbacks of hysteresis and big size, bimorph actuated mirrors have drawbacks of slow response and hence hysteresis-free electrostatically actuated mirrors become the most interesting and attractive 1s. Many developed electrostatic DMs are based on parallel home base actuator type, and the lone disadvantage of this type of actuator is the being of pull in instability. This gives bounds to the actuator ‘s shot to 1/3 of the separation between the home bases ( or spread ) and this allows the usage of other type of actuators excessively.

5.1. Electrostatic propulsion:

The Mems DM with electrostatic actuator ( fig. 6 ) consists of actuator electrodes under a dual cantilever flection which is isolated electrically from of the electrodes and it is maintained at land potency. The electrostatic actuator supports the flexible facesheet mirror through an attachment station at the Centre of each actuator. This station is responsible for interlingual rendition of actuator gesture to a distortion of mirror surface. As shown in fig.6 it is apparent to see that the individual actuator warp influences merely its close neighbors. And it does non do distortions on the full aperture as like in membrane construct mirrors. Likewise, high order aberrances present in the optical way can be corrected by utilizing these DMs. Fig.7shows the surface measurings of DM with individual actuator deflected and with a form of actuators deflected.

Electrostaticss rule is used in order to accomplish distortion of mirror at each point of propulsion utilizing an actuator, as shown in Fig. 8. The actuator has an initial spread as “ g ” , between the flection and the electrode.

With the application of possible, V, between electrode and flection, an attractive electrostatic force created which bends the actuator membrane to downward way. As the flection bends, elastic ( or mechanical ) reconstructing force Acts of the Apostless in the opposite way. These two forces balance at equilibrium and the warp at the membrane midspan in this status is z. The equilibrium warp is really a nonlinear increasing map of V as shown in fig. 9. The equilibrium is stable until the electromotive force is raised to a point where the equilibrium warp is equal to about ? of the initial spread ( g ) . Above that electromotive force, electrostatic forces are so big, for which they can non be balanced by mechanical restoring forces, and so the actuator membrane clangs unstably with that of the fixed electrode at underside. This unstable part should be avoided by and large in practical.

5.2. Piezoelectric Propulsion:

The piezoelectric actuated Mems DM consists of a uninterrupted facesheet mirror in which piezoelectric PZT movies are deposited on its rear. The piezoelectric actuator array is a unimorph construction of PZT movies and a Si device bed. The bottom electrode is taken to be the common electrode at the interface Si and PZT movie. And 19 single electrodes are placed on PZT. The single electrodes are made out as homocentric circles of sections as shown in fig. 9 ( a ) . The electromotive force is applied to the movie which provides a transverse strain and this converted into perpendicular warp with regard to the Si elastic bed limitation. Both concave and convex distortions will be obtained by altering the mutual opposition of the electromotive force applied. When compared to the conventional electrostatic Mems DMs as explained before, the thickness of the membrane of piezo type is greater since because piezoelectric force is usually larger than the electrostatic force. Thus we can state that the

( a ) Plane position of the piezoelectric actuator array

( B ) Displacement profiles of the actuators

piezoelectric DM is more stable even in the presence of perturbation and noise from quivers ( external ) . The supplanting profiles are examined on the actuators 1, 2 and 3 as shown in fig. 9 ( B ) .

This proposed piezoelectric actuated Mems DM shows that hysteresis effects can be reduced by low application electromotive force, but still non compared to hysteresis free electrostatic actuator.

5.3. Electromagnetic Propulsion:

In this type electromagnetic energy is used to deform the DM. It can be used where terrible aberrances need to be corrected. This type of actuator have good optical quality, high one-dimensionality and deficiency of hysteresis ( but non like electrostatic ) , wavelength and strength independency, which makes it suited for broad scope of applications

6. MEMS Deformable Mirror Future Direction

Due to the broad application country for the usage of AO, Mems DM is expected to turn more quickly and will happen more applications in hereafter. Some of the possible applications are discussed here.

6.1. Difficult X-ray Focus:

Difficult X-rays exceeding belongingss make its usage in chemical, elemental and construction analysis of affair. Although 1nm declarations in assorted difficult X ray methods are theoretically possible, the fiction of concentrating optics for such systems remains the chief hurdle. Optical systems used inside the microscopes owe to imperfectnesss caused during fiction and this will degrade the quality of the focussed beam. Therefore, the usage of AO comes into image to acquire 1nm declaration images. The system uses same constituents as shown in fig. 1 with Mems DM as aberrance corrector.

The surface profile of the DM is deformed ( fig. 10 ) in order to counterbalance for the wave front mistake which has been measured antecedently by wave front detector and control system. An ideally focussed beam is produced eventually and therefore acquiring high declaration imagination.

6.2. Optical Communication:

Free-space communicating engineering has an exciting potency since a new method of informations transmittal has been proposed without wires or fibers. In this system, informations is really transmitted in the signifier of optical maser visible radiation in the ambiance. A little figure of commercial system provide this method, but with a limited scope of 1km. When the optical maser beam of information has been sent over longer distances, atmospheric deformations begin to impact the optical maser beam, therefore bring forthing a information loss.So an AO system with Mems DM is to be used to counterbalance for atmospheric deformations, by supplying a high-velocity transmittal, error-free informations and long scope informations nexus.

6.3. Laser Pulse Shaping:

Laser pulsation determining applications normally use liquid crystal modulators ( LCMs ) , to change over optical spread into optical pulsations with short timing ( femto second ) . Mems DM has been found to be the best option for LCMs due to several advantages over LCMs, such as higher optical efficiency, wavelength independency and cost.

6.4. Space applications:

Rather than land based telescopes, Mems DM can besides be used inspace based high-contrast imaging systems for wavefront control, but this application needs high actuator count for high definition images. But the growing of fiction engineering promises to this application shortly.

The future waies can be more than indicated since there is no restriction for Mems DM due to its versatility for broad scope of applications.


Therefore it has been studied that Mems DM are the most effectual portion as wavefront rectification in most of the AO applications. It has been shown the usage of DM in retinal imagination system ( i.e. AOSLO ) and its usage in acquiring high quality image of human oculus. Besides the range of DM in other types of imaging techniques and its future way has been discussed. The different parametric quantities and different constellations of DM commercially used presents have been discussed. Besides the different type of actuators used for DM has been studied along with their pros and cons. The analysis proves that there are broad countries for its application and it has been studied that still fiction betterments have to be taken for high actuator array DMs.


1. “ A MEMS micromirror driven by electrostatic force ” , Fangrong Hu ; Jun Yao ; Chuankai Qiu ; Hao Ren ; Journal of Electrostatics, 2010.

2. “ Retina imagination in vivo with the adaptative optics confocal scanning optical maser ophthalmoscope ” , Jing Lu ; Hao Li ; Ling Wei ; Guohua Shi ; Yudong Zhang ; Proceedings of SPIE, 2009.

3. “ A 4096 Element Continuous Facesheet MEMS Deformable Mirror for High-Contrast Imaging ” , S.A. Cornelissen ; P.A. Bierden1 ; T.G. Bifano ; Proceedings of SPIE, 2008.

4. “ Development of Deformable Mirror Composed of Piezoelectric Thin Films for Adaptive Optics ” , Isaku Kanno ; Takaaki Kunisawa ; Takaaki Suzuki ; Hidetoshi Kotera ; IEEE Journal, 2007.